Fabrication of micro- and nanostructures

• explain the principles behind the basic lithographic processes (including UV lithography, e-beam lithography and nanoimprint lithography), field of use and limitations.
• explain the basic principles behind the processes used for planar processing (including diffusion, metallisation and wet and dry etching).
• calculate relevant process parameters (e.g. time, temperature or pressure) based on the underlying theory (e.g thermal oxidation of silicon, ion implantation, diffusion, electron scattering and interaction between radiation and matter).
• specify detailed process recipes for fabrication of micro- and nanosystems.
• select the most suitable process technology for a given task based on technical and economical considerations.
• use the ATHENA process simulator to predict the result of and optimise a silicon based fabrication process.
• explain technical and fundamental limitations for the fabrication processes used.
• use the kinetic gas theory to calculate process parameters (e.g. flux of molecules, mean free paths).
• use English to communicate and discuss the course content.

In the course the physics, chemistry, and technology of the fabrication processes used is described:
·Lithography: UV-microlithography, e-beam nanolithography, and nano-imprint
·Pattern-transfer: etching, lift-off
·Thin film processes: CVD, PVD, spin-on
·Substrate-materials: Silicon and Silica
·Material modification: Ion-implant and doping-diffusion, annealing
·Bonding: anodic bonding, fusion bonding
·Process integration
·Process simulation
You will learn to use a modern process simulator (ATHENA – http://www.silvaco.com) which will allow you to perform advanced computation.

In the final part of the course you work in teams on making a process flow for a device that the team can freely choose. The process is then presented orally for all students.

Lectures, e-learning and exercises, 4 hours a week. During the semester there are three home assignments. In the final part of the course there is a project which is presented at a scientific mini conference and finally there is a written exam.