Introduction to cleanroom-based microfabrication

• Work safely, cleanly, politely, and independently in the DTU Nanolab cleanroom
• Explain instrument physics and chemistry to specialists and generalists
• Explain technical and fundamental limitations for a given fabrication process
• Calculate relevant process parameters
• Analyze and apply process results
• Design photomasks
• Design and fabricate a simple microelectromechanical system (MEMS)
• Present and discuss a process flow and fabrication results
• Critically select process and characterization instruments for own process flow

The course has a theoretical part and an experimental part. During the experimental part the students will fabricate and characterize a working piezoresistive pressure sensor. Experimental work will cover the following topics:

• Low Pressure Chemical Vapor Deposition
• UV lithography
• Chemical wet etch
• Reactive Ion Etch
• Physical Vapor Deposition
• Lift Off
• Scanning Electron Microscopy
• Probe station based electrical device characterization

In the theoretical part, the physics, chemistry, and technology of the fabrication processes
used in modern nano fabrication is described. Subjects covered are:

• All of the above and
• Plasma Enhanced CVD
• Substrate-materials: Silicon and Silica
• Material modification: Ion-implant and doping-diffusion, annealing
• Bonding: anodic bonding, fusion bonding
• Process integration
• Process simulation

For the exam the students will present the work they have done in the cleanroom and they will present the measured data from their pressure sensors.

Hands-on instructions, lectures, e-learning, exercises, and project work.

Minimum: 6, Maximum: 12.

Please be aware that this course has a minimum requirement for the number of participants needed, in order for it to be held. If these requirements are not met, then the course will not be held. Furthermore, there is a limited number of seats available. If there are too many applicants, a pool will be created for the remainder of the qualified applicants, and they will be selected at random. You will be informed 8 days before the start of the course, whether you have been allocated a spot.