Methods in micro- and nanofabrication

• Work safely, cleanly, politely, and independently in the DTU Nanolab cleanroom
• Explain instrument physics and chemistry to specialists and generalists
• Explain technical and fundamental limitations for a given fabrication process
• Calculate relevant process parameters
• Analyze and apply process results
• Design photomasks
• Design and fabricate a simple microelectromechanical system (MEMS)
• Present and discuss a process flow and fabrication results
• Critically select process and characterization instruments for own process

The course has a theoretical part, a methods part and an applied part. In the theoretical part, the physics, chemistry, and technology of the fabrication processes used in modern micro- and nanofabrication is described. Some of the subjects covered are: UV Lithography, Reactive Ion Etch (RIE), Lift off, Chemical Vapor Deposition (CVD), Plasma Enhanced CVD, Physical Vapor Deposition (PVD), Silicon and Silica as substrate materials, material modification by ion-implant and doping-diffusion, annealing, bonding: anodic bonding, fusion bonding, process integration, process simulation, and characterization. The methods part consists of 5 TPTs (Tool Package Trainings) containing hands-on instructions

1. Cleanroom safety
2. Lithography
3. Mask design
4. Scanning electron microscopy (SEM)
5. Plasma etching

In the applied part of the course, the students will A) follow a guided experimental part focusing on the fabrication of a pressure sensor in the DTU Nanolab cleanroom or B) acquire specialized knowledge in a selected topic of advanced micro- or nanofabrication. In both cases, the results will be presented to the other participants at the end of the course.

Hands-on instructions, lectures, e-learning, exercises, and project work.

Minimum: 3, Maximum: 6.

Please be aware that this course has a minimum requirement for the number of participants needed, in order for it to be held. If these requirements are not met, then the course will not be held. Furthermore, there is a limited number of seats available. If there are too many applicants, a pool will be created for the remainder of the qualified applicants, and they will be selected at random. You will be informed 8 days before the start of the course, whether you have been allocated a spot.