Single-Course English 5 ECTS

Methods in micro- and nanofabrication

Overall Course Objectives

The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as SEM and profilometry. This should enable you to design a fabrication process, draw a lithographic mask and safely work in the DTU Nanolab cleanroom.

Learning Objectives

  • Work safely, cleanly, politely, and independently in the DTU Nanolab cleanroom
  • Explain instrument physics and chemistry to specialists and generalists
  • Explain technical and fundamental limitations for a given fabrication process
  • Calculate relevant process parameters
  • Analyze and apply process results
  • Design photomasks
  • Design and fabricate a simple microelectromechanical system (MEMS)
  • Present and discuss a process flow and fabrication results
  • Critically select process and characterization instruments for own process

Course Content

The course has a theoretical part, a methods part and an applied part. In the theoretical part, the physics, chemistry, and technology of the fabrication processes used in modern micro- and nanofabrication is described. Some of the subjects covered are: UV Lithography, Reactive Ion Etch (RIE), Lift off, Chemical Vapor Deposition (CVD), Plasma Enhanced CVD, Physical Vapor Deposition (PVD), Silicon and Silica as substrate materials, material modification by ion-implant and doping-diffusion, annealing, bonding: anodic bonding, fusion bonding, process integration, process simulation, and characterization. The methods part consists of 5 TPTs (Tool Package Trainings) containing hands-on instructions

1. Cleanroom safety
2. Lithography
3. Mask design
4. Scanning electron microscopy (SEM)
5. Plasma etching

In the applied part of the course, the students will A) follow a guided experimental part focusing on the fabrication of a pressure sensor in the DTU Nanolab cleanroom or B) acquire specialized knowledge in a selected topic of advanced micro- or nanofabrication. In both cases, the results will be presented to the other participants at the end of the course.

Teaching Method

Hands-on instructions, lectures, e-learning, exercises, and project work.

Limited number of seats

Minimum: 3, Maximum: 6.

Please be aware that this course has a minimum requirement for the number of participants needed, in order for it to be held. If these requirements are not met, then the course will not be held. Furthermore, there is a limited number of seats available. If there are too many applicants, a pool will be created for the remainder of the qualified applicants, and they will be selected at random. You will be informed 8 days before the start of the course, whether you have been allocated a spot.

See course in the course database.





13 weeks




DTU Lyngby Campus

Course code 56868
Course type PhD

10.600,00 DKK

Please note that this course has participants limitation. Read more